Factory Automation

MELSERVO-J5 Series Servo Amplifier Progressiveness/Usability

Tuning Functions

Use the tuning methods that are optimal for your machines.

Use the tuning methods that are optimal for your machines.

Quick Tuning

This function automatically performs easy-to-use auto tuning that controls vibration and overshoot just by turning on the servo-on command. Before normal operation, the servo amplifier sets control gain and machine resonance suppression filters in 0.3 seconds by inputting torque to the servo motor automatically. After completing the setting, the servo amplifier starts operation normally.

Quick Tuning

One-Touch Tuning

This function automatically completes servo gain adjustment according to the mechanical characteristics and reduces the settling time just by turning on the one-touch tuning. The servo gain adjustment includes the machine resonance suppression filter, advanced vibration suppression control II, and the robust filter. Controlling overshoot and vibration is improved, maximizing your machine performance.

One-Touch Tuning

Advanced Vibration Suppression Control Ⅱ

This function suppresses two types of low frequency vibrations, owing to vibration suppression algorithm which supports three-inertia system. This function is effective in suppressing residual vibration with relatively low frequency of approximately 100 Hz or less generated at the end of an arm and in a machine, enabling a shorter settling time. Adjustment is easily performed on MR Configurator2.

Advanced Vibration Suppression Control Ⅱ

Command Notch Filter

The frequency can be set close to the machine vibration frequency because the command notch filter has an applicable frequency range between approximately 1 Hz and 2000 Hz.

Machine Resonance Suppression Filter

The expanded applicable frequency range is between 10 Hz and 8000 Hz. Five filters are simultaneously applicable, improving vibration suppression performance of a machine. The machine resonance frequency is detected by the machine analyzer function in MR Configurator2.

Energy/Space Saving and Simple Wiring (200 V)

Simple Converter MR-CM

The MR-CM simple converter saves energy by efficiently using regenerative power through a common bus connection and reduces the number of molded-case circuit breakers and magnet contactors, resulting in space-saving and simple wiring. The simple converter can connect to up to six compatible servo amplifiers having a total capacity of 3 kW or lower.
Using daisy connectors for passing wiring simplifies the wiring for the bus and the control circuit power supply.

Simple Converter MR-CM
  • *The simple converter is also supported by MR-J5-B and MR-J5-A.
Application Examples

Multi-Axis Servo Amplifiers

The 2-axis and 3-axis servo amplifiers are available for operating two and three servo motors, respectively. These servo amplifiers enable an energy-saving and compact machine. Different types of servo motors including rotary servo motors, linear servo motors, and direct drive motors are freely combined as long as the servo motors are compatible with the servo amplifier.

[2-axis servo amplifier]
CC-Link IE TSN-compatible: MR-J5W2-G
SSCNET III/H-compatible: MR-J5W2-B
[3-axis servo amplifier]
CC-Link IE TSN-compatible: MR-J5W3-G
SSCNET III/H-compatible: MR-J5W3-B
Multi-Axis Servo Amplifiers

Energy/Space Saving and Simple Wiring (400 V)

Converter Separate Type Drive Units MR-J5D_-G4

  • The common DC bus connection saves energy and space, and reduces wiring.
  • MR-J5D2-G4 (2-axis drive unit) /MR-J5D3-G4 (3-axis drive unit) save space and reduce wiring further.
  • MR-J5D_-G4 supports safety sub-functions as standard. The safety communication of CC-Link IE TSN enables the safety sub-functions such as STO to be set for each axis of the multi-axis drive units.
  • The drive units are equipped with a replaceable cooling fan unit, which can be easily replaced by users.
Features of MR-J5D-G4 Drive Units

Space-Saving with 3-Axis Drive Units (Smaller Width)

The 400 V 3-axis drive units offer space saving.
For example, two units of 3-axis drive units for operating six axes occupy 200 mm less installation width than six units of 1-axis drive units.
In addition, using multi-axis drive units reduces the number of molded-case circuit breakers and magnetic contactors.

Space-Saving with 3-Axis Drive Units (Smaller Width)

Further Energy-Saving with Common DC Bus Connection and Power Regeneration System

Connecting multiple MR-J5D_-G4 drive units to an MR-CV_4 power regeneration converter unit by a common DC bus connection allows the drive units to use regenerative energy from the other drive units on the connection.
Furthermore, the MR-CV_4 power regeneration converter unit has a power regeneration system which returns the regenerative energy to the power supply. Other systems can use this returned regenerative energy for operation, promoting efficient energy use.
A system with MR-CV_4 does not require a regenerative option and thus reduces heat generation.

Common DC Bus Connection and Power Regeneration System
Application Examples

Common Bus Connection Energy-Saving System Utilizing a Large-Capacity Servo AmplifierNEW

An energy-saving system using a common bus connection can be configured without an option, such as a converter unit, by utilizing the built-in converter of a large-capacity servo amplifier (12 to 25 kW).

Pressure ControlNEW

High-Accuracy and Stable Pressure Control

The analog signal from a pressure sensor (load cell *1) is input to MR-J5-G-LL/MR-J5-B-LL to control the pressure.
The pressure can be kept constant even while the load is changing.
The pressure model adaptive control feed forward enables pressure control with high response and reduced overshoot.

  • *1.A force sensor that enables force measurement by converting force into an electrical signal.
Pressure Control

Path Control

Super Trace Control

This function reduces a position deviation to nearly zero not only during constant-velocity operation, but also during constant acceleration/deceleration.
The path accuracy will be improved in high-rigidity machines.

Super Trace Control

Lost Motion Compensation

This function suppresses quadrant protrusion caused by friction and torsion generated when the servo motor rotates in a reverse direction.
Therefore, the accuracy of circular path will be improved in path control used in XY table, etc.

Lost Motion Compensation

Path Tracking Model Adaptive Control

This function reduces path errors which occur when the servo motor reciprocates. Normally, when positioning control is executed, the model adaptive control adjusts the control to shorten a settling time. Instead, this function reduces overshooting to improve path accuracy, which is suitable for machines that require high-accuracy path control such as processing machines.

Path Tracking Model Adaptive Control

Safety Sub-Functions

Built-in Safety Functions and a Wide Range of Safety Sub-Functions

MR-J5-G-HS/MR-J5-G-RJ/MR-J5W_-G/MR-J5D_-G4 have a built-in safety control part, supporting safety sub-functions without a functional safety unit. Combining the servo amplifiers with HK-_WS servo motors with functional safety further enhances the safety level.

The servo amplifiers support the safety sub-functions of STO/SS1/SS2/SOS/SBC/SLS/SSM/SDI/SLI/SLT at a safety level of SIL 2 or SIL 3.

Safety Sub-Functions

Servo motors with functional safety support the safety sub-functions at a higher safety level. The functional safety encoders provide the servo motor positions and speeds necessary for the safety sub-functions at a safety level of Category 4 PL e, SIL 3.
Encoder cables for the servo motors with functional safety are the same as for the standard servo motors.

Servo motor with functional safety HK-_WS

Wide Range of Safety Functions

The enhanced safety sub-functions contribute to improving equipment safety.

Item MR-J5-G
MR-J5-B(-RJ)
MR-J5W_-B
MR-J5-A(-RJ)
MR-J5-G-RJ
MR-J5W_-G
MR-J5D_-G4
MR-J5-G-HS
Functional safety Safety sub-function STO STO/SS1/SS2/SOS/SBC/SLS/SSM/SDI/SLI/SLT
Safety sub-function via network Not supported Supported*1
Input device One point Three points
Output device One point Three points
  • *1.EtherNet/IP® is not supported.

Safety Sub-Functions via Functional Safety I/O Signals

A safety system can be flexibly configured with MR-J5-G-HS by directly connecting functional safety I/O signals to it without using a safety CPU or a safety remote I/O module.
The servo amplifier supports three points of functional safety I/O signals, enabling execution of multiple safety sub-functions.
For direct wiring, the test pulse diagnosis of MR-J5-G-HS provides the safety sub-function at a safety level of Category 4 PL e, SIL 3.

Safety Observation with Functional Safety I/O Signals

When a safety controller is used, the logic of safety devices can be easily created.
The test pulse diagnosis of the safety controller provides the safety sub-function at a safety level of Category 4 PL e, SIL 3.

Safety Observation with Functional Safety I/O Signals
  • *1.When the test pulse diagnosis of the safety signal is executed with MR-J5-G-HS, the applicable safety level is Category 4, PL e, SIL 3.
  • *2.When the test pulse diagnosis of the safety signal is executed with a safety controller compliant with Category 4, PL e, SIL 3, the applicable safety level is Category 4, PL e, SIL 3.
  • Safety Communication Function via CC-Link IE TSN *2

    CC-Link IE TSN enables building a system where safety and non-safety communications are mixed.
    When combined with R_SFCPU-SET safety CPU and RD78G Motion module, MR-J5-G-HS/MR-J5-G-RJ/MR-J5W_-G/MR-J5D_-G4 can receive safety signal data of the safety CPU through CC-Link IE TSN. Wiring the safety signals to the servo amplifiers is not necessary.

    • *1.Refer to "Safety Sub-Functions" for the compatible servo amplifiers.
    • *2.MR-J5-G-HSN1/MR-J5-G-RJN1/MR-J5W_-G-N1/MR-J5D_-G4-N1 support Safety over EtherCAT® (safety data communication protocol) of EtherCAT®.
    Safety Communication Function via CC-Link IE TSN

Supporting Flexible Driving System

Fully Closed Loop Control *1

Supporting a fully closed loop control system as standard, MR-J5-G/MR-J5W2-G/MR-J5D1-G4/MR-J5D2-G4/MR-J5-B/MR-J5W2-B/MR-J5-A servo amplifiers enable further precise positioning.

  • *1.MR-J5-G/MR-J5W2-G/MR-J5-B/MR-J5W2-B/MR-J5-A servo amplifiers are compatible only with two-wire type serial encoders. For four-wire type serial and pulse train interface (A/B/Z-phase differential output type) encoders, use MR-J5-G-HS/MR-J5-G-RJ/MR-J5D1-G4/MR-J5-B-RJ/MR-J5-A-RJ.
Supporting Flexible Driving System

Scale Measurement Function

The scale measurement function transmits scale measurement data of a scale measurement encoder to a controller via network when the scale measurement encoder such as a linear or rotary encoder is connected to a servo amplifier.
This function enables flexible wiring from the scale measurement encoder.

Servo amplifiers supporting the scale measurement function

  • CC-Link IE TSN-compatible
    For two-wire type encoder:
    • MR-J5-G/MR-J5-G-HS/MR-J5-G-RJ/
      MR-J5W2-G/MR-J5D1-G4/MR-J5D2-G4
    For four-wire type encoder:
    • MR-J5-G-HS/MR-J5-G-RJ/MR-J5D1-G4
  • SSCNET III/H-compatible
    For two-wire type encoder:
    • MR-J5-B/MR-J5-B-RJ/MR-J5W2-B
    Four-wire type encoder:
    • MR-J5-B-RJ
Scale Measurement Function

Touch Probe Function

When a touch probe (sensor) that detects the position of workpieces is connected to a servo amplifier, the touch probe function latches (stores) the position detected by the touch probe. The controller reads and uses the latched value for position correction. The latch accuracy of this function is 1 μs.

Servo amplifiers supporting the touch probe function

  • CC-Link IE TSN-compatible
    • MR-J5-G*1/MR-J5-G-HS/MR-J5-G-RJ/
    • MR-J5W_-G/MR-J5D_-G4
Touch Probe Function
  • *1. Use MR-J5-G manufactured in June 2021 or later.

Positioning by Using a CC-Link IE TSN Master/Local Module

A CC-Link IE TSN master/local module*2 that supports CANopen® can control the servo amplifiers.*1 The servo amplifiers support both the profile mode (position/velocity/torque) and the positioning mode (point table). *3
In the profile position mode, for example, the target positions and speeds can be set from the master station.
The servo amplifier generates commands to the target positions with a start signal and starts positioning operations.

  • *1.RD78G/FX5-SSC-G Motion modules also support CANopen®.
  • *2.For the CC-Link IE TSN master/local module, refer to each module manual.
  • *3.For the modes supported by the master station, refer to the master station specifications.
Positioning by Using a CC-Link IE TSN-Compatible RJ71GN11-T2

Driver Communication Function

The controller controls the master axis by using the driver communication function of the servo amplifiers (MR-J5-G/MR-J5D1-G4/MR-J5-B). The servo amplifier of the master axis transmits the torque data to the servo amplifiers of the following axes on the same network, and the servo amplifiers also drive the servo motors on the basis of the torque data transmitted from the master axis. The data is transmitted via network, and thus no special wiring is necessary.

Driver Communication Function
Driver Communication Function
  • *This function is not supported by MR-J5-G-N1/MR-J5D1-G4-N1. 

Compliance with SEMI-F47

MELSERVO-J5 series servo amplifiers comply with SEMI-F47 standard *1 for semiconductors and FPD manufacturing systems.
(SEMI-F47 is not applicable to 1-phase 200 V AC input, DC input, and MR-J5D_-G4.)

  • *1.The backup capacitor may be required depending on the power impedance and operating situation for the instantaneous power failure of the main circuit power supply. Be sure to perform a test on your machine to meet the SEMI-F47 (Specification for Semiconductor Processing Equipment Voltage Sag Immunity) standard. Please use the 3-phase power supply for the servo amplifier input.

Improved Environmental Resistance

Servo amplifiers with special coating-specification are now available. This servo amplifier has an improved corrosion resistance in environments with corrosive gas.
For details, contact your local office.

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