The environmental resistance specifications of RH-3FHR (C: Clean specification, W: Waterproof specification) are factory-set custom specifications.
*2)
Preservation of cleanliness levels depends on conditions of a downstream flow of 0.3 m/s in the clean room and internal robot suctioning. A fai8-mm coupler for suctioning is provided at the back of the base.
*3)
Direct jet to the bellows is excluded.
*4)
Based on a load capacity of 1 kg. The cycle time may increase if specific requirements apply such as high work positioning accuracy, or depending on the operating position. (The cycle time is based on back-and-forth movement over a vertical distance of 25 mm and horizontal distance of 300 mm.)
*5)
Select either controller according to your application.